High-temperature pressure sensor using floating concept
Innovative pressure sensor designed for high-temperature applications up to 1500°C, using a floating concept to prevent system leakage. Features a robust SOI sensor element and adaptable membrane for enhanced linearity and reliability.
Overview
The proposed innovation is a high-temperature pressure sensor utilizing a floating concept, designed to operate effectively in environments up to 1500°C. It features a membrane made from high melting materials and a push rod as the transfer element to ensure reliability and stability under extreme conditions. This sensor can be easily mounted and replaced, minimizing system leakage and maintenance challenges.
Technical specifications
Key features:
- A robust silicon-on-insulator (SOI) sensor element capable of operating up to 400°C, with potential adaptation using a silicon carbide (SiC) sensor for higher resilience.
- A membrane and MESA structure designed to optimize linearity and couple effectively with the push rod.
- The sensor is mounted on a ceramic carrier with through vias to facilitate signal transmission to electronics, ensuring clear and reliable data output.
- The design is based on proven SOI sensor technology from past collaborative developments, with enhancements for higher temperature operations.
Technology readiness level
Currently at TRL 2, the sensor concept is undergoing FEM simulations to refine its geometry and performance at elevated temperatures. Future steps include the development of a demonstrator, electronic compensation solutions, and customer-side characterization to validate and optimize the design.
About Berlin University of Applied Sciences
HTW Berlin is a large public university of applied sciences in Germany, with about 16,200 students, 300 professors, and 80 degree programmes, and a distinctly practice-oriented character. Its two Berlin campuses provide modern laboratory infrastructure and proximity to a dense network of companies, public bodies, cultural institutions, and research organisations across the capital region. Corporate partners can engage through collaborative or contract research, consultancy, and practice-based student projects, while the Service-Centre Research helps companies find experts, arrange laboratory visits, and shape cooperation. Research draws on competitive funding from the BMBF and BMWK, EU programmes, state sources, foundations, and contract research. The university also advises on patents and licensing.
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