Epitaxial growth of nitride semiconductors using pulsed laser deposition
This advanced solution leverages pulsed laser deposition (PLD) for the heteroepitaxial growth of nitride semiconductors, offering advantages in uniformity and surface smoothness over traditional methods. Suitable for applications in semiconductors and superconductors.
Overview
Our solution focuses on the epitaxial growth of nitride-based semiconductors using pulsed laser deposition (PLD). This method offers significant advantages over traditional techniques like metal-organic chemical vapor deposition (MOCVD), including lower deposition temperatures and smoother, more uniform films. This innovation is particularly relevant for the development of high-performance semiconductors and superconductors, supporting advancements in fields such as commercial nuclear fusion.
Technical specifications
Key features:
- Pulsed Laser Deposition (PLD): Utilizes advanced pulsed laser ablation for the deposition of nitride semiconductors like GaN and AlN.
- In-situ RHEED/LAXS: Provides real-time monitoring of film growth for precise control.
- Compatibility: Suitable for substrates previously used in MOCVD, allowing for seamless integration into existing processes.
- High-Quality Films: Produces films with exceptional uniformity and surface smoothness.
- Advanced Characterization: Utilizes high-resolution X-ray diffraction and high-resolution transmission electron microscopy (HRTEM) for detailed film analysis.
Technology readiness level
This technology is currently at TRL 2, indicating that the concept and application have been formulated. Ongoing validation efforts include testing on preferred substrates and characterizing the films under various conditions to optimize performance.
About University at Buffalo, State University of New York
University at Buffalo is a comprehensive public research university and a leading campus in the State University of New York system. Industry engagement is anchored by co-located labs on a downtown medical campus, a research and technology park with incubators, shared core facilities, and co-op talent pipelines. Partnerships with regional hospitals enable clinical studies and translation, while proximity to the U.S.–Canada border and the binational Great Lakes corridor facilitates cross‑border collaboration. Research is supported by competitive federal funding from NIH, NSF, DOE, and DoD, alongside New York State innovation programs. A dedicated technology transfer office provides IP management, licensing, and startup support.
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