Low-cost epitaxial growth techniques for nitrides and related compounds
This solution leverages pulsed laser deposition (PLD) and vapor solid liquid (VLS) techniques for cost-effective epitaxial growth of nitrides and III-V compounds. These methods offer lower temperature processes with simpler tools, making them an economical alternative to traditional techniques.
Overview
This innovative approach utilizes pulsed laser deposition (PLD) and vapor solid liquid (VLS) techniques to achieve low-cost epitaxial growth of nitrides and related III-V compounds. By employing these methods, researchers aim to provide a more economical alternative to traditional growth techniques like MBE, MOCVD, and HPVE. The focus is on growing high-quality epitaxial and single-crystalline thin films on a variety of non-epitaxial surfaces, including silicon, which can significantly reduce production costs in semiconductor manufacturing.
Technical specifications
- Pulsed Laser Deposition (PLD): Utilizes a low-cost plasma-based approach to grow epitaxial and textured thin films of nitrides.
- Vapor Solid Liquid (VLS): Facilitates the growth of Phosphides and Arsenides of In, Ga, and its alloys as single crystalline thin films.
- Lower Temperature Processes: Both techniques operate at significantly lower temperatures compared to traditional methods, reducing energy consumption and equipment wear.
- Compatibility with Various Substrates: Capable of growing films on non-epitaxial templates and silicon, broadening application potential.
Technology readiness level
The current technology readiness level is 3. The solution has been demonstrated in a laboratory setting with plans for further validation through epitaxial growth demonstrations, characterization, and potential device development in collaboration with industry partners.
About University of Southern California
USC is a large, comprehensive private research university in Los Angeles, anchored by two urban campuses and an academic health system. Industry engages through applied research institutes such as the Information Sciences Institute, co-located engineering and clinical facilities, and flexible sponsored research contracting. Proximity to the region’s aerospace, media, and biotech corridors provides access to testbeds, talent, and pilot-scale partners across the greater L.A. innovation economy. Research is supported by competitive federal funding from NIH, NSF, and other major agencies alongside significant industry-sponsored awards. A dedicated technology transfer office supports IP strategy, licensing, corporate partnerships, and venture formation.
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