MEMS optical sensors for high-temperature pressure monitoring
A sapphire-based MEMS pressure sensor integrated with a fiber-optic Fabry-Perot interferometer for reliable low-pressure monitoring in high-temperature environments, offering temperature stability and immunity to electromagnetic interference.
Overview
The proposed solution is a sapphire-based MEMS pressure sensor that utilizes a fiber-optic Fabry-Perot interferometric transduction mechanism. This innovative sensor is designed for seamless integration with refractory components to measure low-pressure changes in extreme temperature environments, such as those encountered in the continuous casting process of steel. The optical signal detection method ensures safe transmission due to its temperature stability and immunity to electromagnetic interference, making it ideal for harsh industrial settings.
Technical specifications
- Sapphire-based MEMS sensor: The sensor is built using sapphire components, which provide excellent thermal stability and mechanical strength for high-temperature applications.
- Fiber-optic Fabry-Perot interferometer: This transduction mechanism allows for precise pressure measurement with high sensitivity and low non-linearity.
- Temperature range: Designed to operate effectively in environments up to 1000°C.
- Pressure range: Capable of measuring pressures from 0 to 1000 psi with a sensitivity of up to 0.22 nm/psi.
- Refractory housing: The sensor is packaged in a ceramic compatible with existing iso-refractory components, allowing for easy integration and thermal stress management.
Technology readiness level
The technology is currently at TRL 4. It has been validated in lab conditions with plans to further test and optimize the sensor for integration in the continuous casting process of steel. The next steps include fabricating the sapphire membrane and optical cavity, designing the dual sapphire fiber-optic probe, and testing the complete sensor assembly in high-temperature environments.
About University of Waterloo
University of Waterloo is a public research university in Ontario, Canada, known for an entrepreneurial, STEM‑driven culture. A globally recognized co‑op program places students with employers year‑round, creating direct talent pipelines and de‑risked pathways into sponsored research and contract development. An adjacent research and technology park hosts corporate R&D alongside faculty labs, and the campus sits within the Toronto–Waterloo innovation corridor for ready access to partners, investors, and scale‑up resources. Research is supported by competitive federal funding from Canada’s Tri‑Council agencies (NSERC, CIHR, SSHRC) and international programs. A creator‑owned IP policy and a dedicated tech transfer office enable flexible agreements, licensing, and spinouts.
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