Hyo jae Yoon's profile

Hyo jae Yoon

Principal Investigator

Korea University

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9 months ago

Inorganic Chemistry, Organometallic Materials, Nanolithography, Surface Science

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Holds a non-provisional patent on photoresist compositions; develops organometallic and coordinative materials for EUV lithography. Scope spans synthesis, spectroscopy, and surface analysis to advance molecularly defined, high-absorption resists.

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Korea University

Organometallic complexes for high-performance EUV photoresists

Innovative organometallic complex-based photoresists offer high sensitivity and etch resistance for EUV lithography, enabling nanoscale patterning with versatile applications in semiconductor manufacturing.

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Hyo jae Yoon

Principal Investigator

Korea University

Work experience

Korea University

Principal Investigator

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