Organometallic complexes for high-performance EUV photoresists
Innovative organometallic complex-based photoresists offer high sensitivity and etch resistance for EUV lithography, enabling nanoscale patterning with versatile applications in semiconductor manufacturing.
Overview
Organometallic complexes designed for high-performance EUV photoresists offer groundbreaking capabilities in semiconductor manufacturing. These photoresists provide exceptional EUV sensitivity and high etch resistance, crucial for fabricating intricate nanoscale patterns. Their modular molecular architecture allows for customization, making them suitable for both negative and positive-tone processes, particularly effective for nanoscale hole features.
Technical specifications
Key features:
- Modular molecular architecture: Allows incorporation and tuning of diverse metal centers for specific process requirements.
- High EUV sensitivity: Enables precise material behavior control at the atomic level under EUV exposure.
- High etch resistance: Ensures durability and reliability in harsh processing environments.
- Versatile application: Suitable for both negative- and positive-tone processes, providing flexibility in patterning.
Photochemical behavior:
- Ligands engineered to react with low-energy electrons from EUV exposure, triggering necessary hydrophilicity changes.
- Metal centers selected for primary resist functions, with tunable metal atom counts to adjust sensitivity and dose requirements.
Technology readiness level
The technology is currently at TRL 3, having undergone initial proof of concept with ongoing efforts for further structural characterization and performance testing. Plans are in place for field evaluation and scalability exploration with industrial partners.
About Korea University
Korea University is a large, comprehensive private research university in Seoul, combining broad academic depth with a strong orientation to industry collaboration. Its integration with a multi-hospital academic medical system enables clinical studies, access to real‑world evidence, and practical pathways to translation. Partnerships are enabled by contract research, corporate‑sponsored labs, consortia, and a technology transfer office for IP, licensing, and startup formation, with on‑campus incubators and prototyping spaces connecting companies to talent. Research is supported by competitive national funding, including programs from the National Research Foundation of Korea and other ministries, and an industry liaison function simplifies access to faculty expertise and shared instrumentation.
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