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Low-temperature technologies for ultra-high-purity chemical recycling
  • Background
  • What we're looking for
  • What we can offer you
  • Q&A
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Background

We are a global leader in advanced materials, with expertise in high-purity chemicals, high-performance polymers and electronic materials, driving innovation in the semiconductor industry. In recent years, the demand for semiconductors has been continuously expanding, leading to a significant increase in the usage of chemicals in semiconductor manufacturing processes. Among these chemicals, ultra-high-purity sulfuric acid is widely used in semiconductor cleaning and surface preparation processes due to its strong oxidative and contaminant removal capabilities. 

 

Recycling technologies for chemicals used in semiconductor processes have been gaining attention to reduce environmental impact and promote efficient resource utilization. Because semiconductor manufacturing requires extremely low levels of metallic, particulate and organic impurities, maintaining sulfuric acid purity during recycling is highly challenging. Conventional recycling approaches face limitations related to impurity removal efficiency and material compatibility, while process-derived contaminants may further impact acid stability. 

 

By leveraging technologies such as distillation/membrane separation, chemicals can be reused while maintaining ultra-high purity, enabling sustainable manufacturing processes. In the future, advancements in recycling technologies are expected to lead to the adoption of even more efficient systems.

What we're looking for

We are looking for novel recycling technologies for ultra-high-purity sulfuric acid used in semiconductor manufacturing processes. Ideal technologies would minimize energy consumption and reduce burden on production equipment.

Solutions of interest include:
  • Electrodialysis
  • Membrane filtration (RO/NF)
  • Ion exchange method
  • Chelating resin
  • Electrochemical purification
  • Vacuum-assisted low-temperature concentration
Our must-have requirements are:
  • Target recycling process temperature for ultra-high-purity sulfuric acid below 100°C
  • Target metal impurity concentration in recycled ultra-high-purity sulfuric acid below 10 ppt
Our nice-to-have's are:
  • Ambient temperature recycling processes
  • Metal impurity concentration below 5 ppt in recycled sulfuric acid
  • Recycling rate above 99%
What's out of scope:
  • Spent acid combustion process
  • Evaporation/distillation operating above 100°C
Acceptable technology readiness levels (TRL):
Levels 3-6
What we can offer you
Eligible partnership models:
Sponsored researchCo-developmentLicensingPilot or trial engagement
Benefits:
Sponsored Research
Funding is proposal dependent and typically ranges from 50,000 - 100,000 USD for a proof-of-concept study to demonstrate industrial relevance.
Facilities and Services
Access to a leading research and innovation hub in nanoelectronics and digital technologies for validation, provided the technology demonstrates industrial relevance.
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